The Fourier Transform Infrared Spectroscopy (FTIR) analyzer is used in the semiconductor manufacturing industry FTIR is a spectral analysis instrument that uses infrared spectroscopy to analyze impurity concentration through Fourier transform. The spectrometer mainly consists of a light source (silicon carbon rod, high-pressure mercury lamp), Michelson interferometer, detector, and interferometer
The infrared light emitted by the infrared light source S is collimated into a parallel infrared beam and enters the interference system. After adjustment by the interferometer, a beam of interference light is obtained. The interference light passes through sample Sa to obtain an interference signal containing spectral information, which reaches detector D and is then converted into an electrical signal by D. The interference signal here is a time function, which is the interference pattern drawn by the interference signal, and its horizontal axis is the moving time or distance of the moving mirror. This interference pattern is sent to the computer through an A/D converter, and the computer performs fast Fourier transform calculations to obtain an infrared spectrum with wavenumber as the horizontal axis. Then it is sent to a plotter through a D/A converter to draw a very familiar standard infrared absorption spectrum.
